• Aluminum Nitride Ceramic Heater Manufacturers, Aluminum Nitride Ceramic Heater Factory, Supply Aluminum Nitride Ceramic Heater
  • Aluminum Nitride Ceramic Heater Manufacturers, Aluminum Nitride Ceramic Heater Factory, Supply Aluminum Nitride Ceramic Heater
  • Aluminum Nitride Ceramic Heater Manufacturers, Aluminum Nitride Ceramic Heater Factory, Supply Aluminum Nitride Ceramic Heater
  • Aluminum Nitride Ceramic Heater Manufacturers, Aluminum Nitride Ceramic Heater Factory, Supply Aluminum Nitride Ceramic Heater
Aluminum Nitride Ceramic Heater
  • XMCERA
  • XIAMEN
  • 45 DAYS
  • 1000PCS

Aluminum Nitride Ceramic Heater has properties of high thermal conductivity, excellent heat equalization and electrical insulation. ALN ceramic heater is widely used for semiconductor manufacturing devices, and it can be used for vacuum evaporation system(VES), sputtering machines and CVD devices.

Aluminum Nitride Ceramic Heater

Aluminum Nitride Ceramic Heater

Aluminum Nitride Ceramic Heater has properties of high thermal shock resistant, high thermal conductivity and electrical insulation. ALN ceramic heater is widely used for mainly semiconductor processing, and it can be used for vacuum evaporation system(VES), sputtering machines and CVD devices.

Aluminum Nitride Ceramic Heater


About Aluminum Nitride Ceramics

Aluminum Nitride (AlN) Ceramics is an excellent ceramic material to use if high thermal conductivity and electrical insulation properties are required, making it an ideal material for use in thermal management and electrical applications.

Aluminum Nitride Ceramic Heater has a coefficient of thermal expansion and electrical insulation properties that closely matches that of Silicon wafer material, making it an useful material for electronics applications where high temperatures and heat dissipation is often a problem.

ceramic wafer heater

Aluminum Nitride Heater Multiple Configurations Available 

• Plates 

• Pedestals (plate hermetically bonded to shaft) 

• Rings 

• Custom applications 


Various AlN Ceramic Heater Sizes Supported 

• 150 mm 

• 200 mm 

• 300 mm 

 

Options and Specifications 

• Operating temperature up to 750 °C 

• Single or multiple heating zones 

• Embedded RF antenna or ground plane available 

• Ramp rate 10-15 °C/minute 

• Patented hot pressed, unibody technology


Properties of Aluminum Nitride Ceramics Heater

  • High thermal conductivity

  • Low coefficient of thermal expansion

  • Good electrical insulation and resistivity

  • Low dielectric constant

  • High mechanical strength under compression load

  • Corrosion resistant (gas)

  • Good thermal shock resistance


Applications of Aluminum Nitride Ceramics materials

  • Heat sinks & heat spreaders

  • Electrical insulators for lasers

  • Chucks, clamp rings for semiconductor processing equipment

  • Electrical insulators

  • Silicon wafer handling and processing

  • Substrates & insulators for microelectronic devices & opto electronic devices

  • Substrates for electronic packages

  • Chip carriers for sensors and detectors

  • Chiplets

  • Collets

  • Laser heat management components

  • Molten metal fixtures

  • Packages for microwave devices

aln ceramic heating element


Properties
Units
Value
Color

Grey
Mechanical Properties
Density
g/cm3
3.30
Modulus of Elasticity
GPa
310
Fracture toughness
Mpa x m^1/2
3.5
Poissons Ratio

0.25
Compressive Strength
MPa
2100
Flexural Strength
MPa
335
Hardness (Knoop 100 g)
Kg/mm2
1170
Hardness (Vickers)
GPa
11
Thermal Properties
Maximum Temperature 


Oxidizing
°C
700
Inert
°C
1300
Thermal Conductivity
@ 25°C
W/mK
180
@ 300°C
W/mK
130
Specific Heat
J/kg.K
750
Thermal Shock Resistance ΔT
°C
400
Coefficient of Expansion


CTE 25°C ➞ 100°C
10^-6/°C
3.6
CTE 25°C ➞ 300°C
10^-6/°C
4.6
CTE 25°C ➞ 500°C
10^-6/°C
5.2
CTE 25°C ➞ 1000°C
10^-6/°C
5.6
Electrical Properties
Dielectric Constant
1 MHz
8.6
Loss Tangent
1 MHz
5x10^-4
Dielectric Strength
kV/mm
>15
Volume Resistivity


25°C
Ω cm
>10^13
300°C
Ω cm
10^9
500°C
Ω cm
10^7

Aluminum Nitride Ceramic Heater


FAQ
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Price and Lead Times We minimize your cost by assigning your part to the best and fastest XMCERA manufacturing system. Our machining service can handle almost all of the parts we receive from buyers like you, saving you money and shortening lead times. As we say, Quotes in hours. Parts in days. Often, we provide parts in as fast as one day! Consistency When you order prototypes from us, you ...more
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